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High Purity

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The following regulators are used in High Purity applications:

  Series

Name Service Inlet Pressure Range Outlet Pressure Range Materials Sizes Cv
UPR-1 Precision Pressure Regulator Gas 0-6,000 psig 0-500 psig 316L SS, Hastelloy C 1/4", 3/8", 1/2" 0.025-0.20
UCP-1 Precision Pressure Regulator Gas 0-6,000 psig 0-500 psig 316L SS 1/4" 0.025-0.20
UPR-7 High Flow Precision Pressure Regulator Gas 0-3,600 psig 0-500 psig 316L SS, Hastelloy C 1/4", 3/8", 1/2", 3/4" 0.2-1.1

 NOTES:
bulletThe model UPR-1 is the High Purity version of the GO Regulator PR-1, whose design and performance reliability has been proven in over 30 years of field use. The UPR-1 design features include internal components with standard surface finishes better than 25 Ra. This feature provides the semiconductor end-user with a precision pressure regulator, economically priced for applications ranging from gas distribution to point of use in the manufacturing tool.
bulletThe model UCP-1 offers the user an ultra-compact pressure regulator for use in high purity systems for the semiconductor industry. Meeting the highest purity standards and low particle generation of the semiconductor industry, this unit features internal components with standard surface finishes better than 25 Ra. The UCP-1 was computer designed to ensure a laminar flow transition from the flow control orifice to the outlet port. This design ensures virtually zero particle entrapment and efficient purge cycles.
bulletThe high flow coefficient of the UPR-7 provides the user with a high purity pressure regulator exhibiting very low droop characteristics. The combination of high flow and low droop makes the UPR-7 ideally suited for bulk gas distribution applications. The model UPR-7 features fully electropolished internal components with standard surface finishes better than 25 Ra. This feature provides the semiconductor end-user with a precision pressure regulator, economically priced for applications ranging from gas distribution to point of use in the manufacturing tool.

 

The complete High Purity Regulator catalog is available for download (10 pgs./249KB).

 

Teflon® and Tefzel® are registered trademarks of Dupont. Viton® and Kalrez® are registered trademarks of Dupont Dow Elastomers.

This page last updated: Wednesday, January 28, 2004
© Copyright 1998-2004 Fluid Process Control Corporation.
Information in this document is subject to change without notice.
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